Projektnummer

0051030

Zusammenfassung

The project focusses on a new class of area-selective surface modification processes, based on atmospheric pressure microplasmas, which will integrate surface treatment and lateral microstructuring within one process step. The microplasmas to be investigated will be generated in cavities which are formed temporarily by the substrate to be treated area-selectively and a suitably formed arrangement of an electrode and a polymer dielectric generated by new microtechnical techniques. For a range of cavity dimensions (50-500 µm), electrical conductivities of the polymer substrates, and for ...