Projektnummer

0053650

Zusammenfassung

A new approach to micropatterned deposition of thin films on insulating or conductive substrates will be studied, based on highly porous metal sheets serving as gas-permeable backing plates for cavity-bearing layers, which can either be formed by an insulating sheet of a polymer such as PDMS, or a metal. Within the voids, formed by the substrates, microplasmas will be generated by excitation with AC voltages in the medium (MF) or radio frequency (RF) range and will be utilized for micropatterned plasma-deposition of thin films on substrate areas defined by the cavities. Source gases ar...