Projektnummer

0057486

Zusammenfassung

In the first project phase the fundamentals for the investigation and application of single-walled carbon nanotubes (SWCNTs) as piezoresistive sensing elements have been laid. With this research an actual batch processing compatible CNT/MEMS technology has been demonstrated for the first time. A MEMS test stage has been realized allowing to investigate mechanical and electrical properties of CNTs under mechanical load and to perform reliability studies on the CNT-metal interface. In the project renewal we will intensify those studies with a novel analytical approach on the one hand. Wi...